Fabrication Techniques for Multilayer Metalization and Patterning, and Surface Mounting of Components on Cylindrical Substrates for Tube-Shaped Micro-Tools
作者： S. Goto , T. Matsunaga , J. J. Chen , W. Makishi , M. Esashi
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摘要: This paper reports fabrication techniques for multilayer microstructures and surface mounting of small components on cylindrical substrates tube-shaped high-performance micro-tools. A shape is an ideal micro medical tools inserted temporarily or implanted in the human body. Miniaturization, multifunctional capabilities, are required these tools. Tubular lumens, which useful insertion injection drugs, necessary endoscopes catheters. Micro-fabrication meets demands. Multilayer metallization patterning, as well three-dimensional resist patterning have been performed using maskless lithography glass tubes with 2 3 mm outer diameters. Using laser soldering techniques, a high-speed OP amp has mounted circuit formed tube to amplify signals from sensors. These will realize
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