Deposition of Ag/a-C:H nanocomposite films with Ag surface enrichment
作者： Mykhailo Vaidulych , Jan Hanuš , Tereza Steinhartová , Ondřej Kylián , Andrei Choukourov
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摘要: The nanocomposite films Ag/a-C:H were prepared by vacuum-based method which combines deposition of Ag nanoparticles means gas aggregation source (GAS) and PECVD a-C:H matrix. matrix was deposited in a mixture Ar n-hexane on the substrates placed powered RF electrode facing beam NPs from GAS. Anisotropic plasma etching used to increase concentration surface coating. influence three types chemical composition coatings size is described. It shown that best selectivity thus highest reached case grounded samples low pressure oxygen plasma. This treatment enhances short term antibacterial efficiency produced coatings.
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