Numerical Simulation on Tandem Negative Ion Source

摘要: It is commonly accepted that in a hydrogen volume source the negative ions H- are formed by dissociative attachment of slow plasma electrons e to vibrationally excited molecules H2 *(v″), where v″ vibrational quantum number.1,2 The excitation attributed electron impact fast primary ef discharge.3 To clarify mechanism production and show dependence on parameters concretely, we have proposed set particle balapce equations for steady-state single chamber system.4,5 According our recent simulation results,6–8 most produced two-step process mentioned above, i.e. H2+ef→H2 *(v″)+ef; *(v″)+e→H-+H. Besides, presence with energies Efe excess 40 eV reasonable *(v″) while temperature \( {{T}_{e}} \cong 1eV \) optimum formation.