A Fully Integrated Shear Stress Sensor

作者: Q. Lin , Y.C. Tai , R. Goodman , C.M. Ho , V. Koosh

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摘要: Author(s): X.Q. Wang; Z. Han; F. Jiang; T. Tsao; Q. Lin; Y.C. Tai; V. Koosh; R. Goodman; J. Law; C.M. Ho

参考文章(3)
Richard J. Goldstein, Fluid Mechanics Measurements ,(1996)
Fukang Jiang, Yu-Chong Tai, B. Gupta, R. Goodman, S. Tung, Jin-Biao Huang, Chih-Ming Ho, A surface-micromachined shear stress imager international conference on micro electro mechanical systems. pp. 110- 115 ,(1996) , 10.1109/MEMSYS.1996.493838