MEMS Thermal Shear-Stress Sensors: Experiments, Theory and Modeling
作者： Q. Lin , F. Jiang , X.-Q. Wang , Z. Han , Y.-C. Tai
关键词:
摘要: We have made many versions of MEMS thermal shearstress sensors and they been used in applications successfully. However, it has found that the classical 1-D theory for conventional is inapplicable to our sensors. This paper then presents a systematic study this issue first time, an adequate theoretical analysis developed obtained new model excellent agreement with experimental data. It 2-D shear stress sensor be include heat transfer effects are normally ignored by theory. Not only experimentally confirm model, we also performed 3D simulation results support proposed
sci-hub.st 参考文章(7)
Yu Chong Tai, Chang Liu, Chih Ming Ho, Jin Biao Huang, Surface micromachined thermal shear stress sensor Proceedings of the 1994 International Mechanical Engineering Congress and Exposition. pp. 9- 15 ,(1994)
Frank M. White, Viscous Fluid Flow ,(1974)
Motoaki Kimura, Steve Tung, James Lew, Chih-Ming Ho, Fukang Jiang, Yu-Chong Tai, Measurements of wall shear stress of a turbulent boundary layer using a micro-shear-stress imaging chip Fluid Dynamics Research. ,vol. 24, pp. 329- 342 ,(1999) , 10.1016/S0169-5983(99)00002-7
B. J. Bellhouse, D. L. Schultz, Determination of mean and dynamic skin friction, separation and transition in low-speed flow with a thin-film heated element Journal of Fluid Mechanics. ,vol. 24, pp. 379- 400 ,(1966) , 10.1017/S0022112066000715
Fukang Jiang, Yu-Chong Tai, B. Gupta, R. Goodman, S. Tung, Jin-Biao Huang, Chih-Ming Ho, A surface-micromachined shear stress imager international conference on micro electro mechanical systems. pp. 110- 115 ,(1996) , 10.1109/MEMSYS.1996.493838
Fukang Jiang, Yu-Chong Tai, K. Walsh, T. Tsao, Gwo-Bin Lee, Chih-Ming Ho, A flexible MEMS technology and its first application to shear stress sensor skin international conference on micro electro mechanical systems. pp. 465- 470 ,(1997) , 10.1109/MEMSYS.1997.581894
Q. Lin, Y.C. Tai, R. Goodman, C.M. Ho, V. Koosh, J. Law, Z. Han, F. Jiang, X.Q. Wang, T. Tsao, A Fully Integrated Shear Stress Sensor Center for Embedded Network Sensing. ,(1999)