Integrated circuit system employing selective epitaxial growth technology
作者： Shailendra Mishra , Liang-Choo Hsia , Wenzhi Gao , Alex K. H. See , Johnny Widodo
DOI:
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摘要: An integrated circuit system that includes: providing a substrate; depositing dielectric on the an isolation dielectric; forming trench through and to expose liner over system; processing form spacer; epitaxial growth within includes crystalline orientation is substantially identical substrate.
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