作者: Jui Hsieh Lai , Tien-I Bao , Ying-hao Kuo , Hai-Ching Chen
DOI:
关键词:
摘要: A semiconductor device, a package structure, and methods of forming the same are disclosed. An embodiment is device comprising first optical over substrate, vertical waveguide on top surface second substrate waveguide. The further comprises lens capping layer wherein aligned with waveguide, layer.