The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport
作者： S. Vepřek , V. Mareček
DOI: 10.1016/0038-1101(68)90071-3
关键词:
摘要: … The transport is probably carried on by volatile hydrides of Ge … lieu une reaction de transport de Ge et Si. Cette reaction est … of our work was to verify a possibility of Si and Ge hydrogen …
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sci-hub.se 参考文章(4)
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