Integrated circuit device and process for its manufacture
作者： Richard Anthony Dipietro , John Patrick Hummel , Robert Dennis Miller , James Lupton Hedrick , Do Yeung Yoon
DOI:
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摘要: The invention relates to an integrated circuit device comprising (i) a substrate; (ii) metallic lines positioned on the substrate and (iii) dielectric material lines. comprises reaction product of organic polysilica polyamic ester preferably terminated with alkoxysilyl alkyl group.
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