Polarization Properties of Bismuth Strontium Tantalate Ceramic Films Deposited by Aerosol Deposition Method

作者: Muneyasu Suzuki , Yoshiya Nishihara , Yoshiaki Uesu , Jun Akedo

DOI: 10.1143/JJAP.51.09LA17

关键词:

摘要: We report aerosol deposition (AD) method for preparation of bismuth layer-structured ferroelectric thick films with enhanced and insulating properties. Constitution phase, crystal structure, polarization leakage current properties SrBi2Ta2O9 (SBTa) thickness 2–4 µm were investigated. While obtained as-deposited SBTa have slight c-axis grain orientation, the degree orientation annealed at higher than 1000 °C was same as that sintered bulks. Fracture cross-sectional scanning electron microscopy (SEM) images revealed on glass substrates had a fully dense microstructure. The low density (J) less 10-7 A/cm2 1 MV/cm observed 900 °C, indicated remanent (Pr) 5.7 µC/cm2, which is larger bulks (Pr 4.7 µC/cm2) fabricated by conventional solid-state reaction using starting raw powder used AD method.

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