作者: Y. Hatakeyama , T. Hanai , S. Suzuki , Y. Kokubun
关键词:
摘要: To eliminate the scattering loss at crossing points of cross grid busline waveguides, a multilevel structure waveguide was introduced into vertically coupled microring resonator filter. The top surface each buried perfectly planarized by new fabrication process and clear filter responses were observed for single ring series double with waveguides.