Electrical properties of ZnO Nano-particles embedded in polyimide

摘要: The ZnO nano-particles were made in the polyimide dielectric matrix by using chemical reaction between zinc metal film and polyamic acid. concentration of particle is about 1.5×1012 cm−2, with average size below 10 nm, its shapes are almost spherical. Then, layer a stable material constant 2.9. To investigate electrical properties particles insulator film, we fabricated metal-insulator-semiconductor (MIS) structure measured capacitance-voltage (C-V) temperature modulation. At room temperature, C-V hysteresis voltage gap 2.8 V appeared MIS SiO2/Si substrate. As measuring decreased, curves shifted slightly to accumulation region gate bias. It was considered that charging may occur dominantly nanoparticles, having only few defects at interface polyimide/SiO2 polyimide/ZnO.