Investigation of the Al/TiSi2/Si contact system
作者： Chung Yu Ting , Marc Wittmer
DOI: 10.1063/1.332018
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摘要: We have studied the thermal stability of the Al/TiSi2/Si contact system with Rutherford backscattering and glancing‐angle x‐ray diffraction. The results show that this sytem is …
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