Measuring the Thickness of Aluminium Alloy Thin Foils Using Electron Energy Loss Spectroscopy

摘要: Combining electron energy loss spectroscopy and convergent beam diffraction measurements, we have determined the mean-free-path for inelastic scattering four different aluminium alloys. Electron spectra were acquired with transmission microscope in image mode, without any objective aperture inserted. The value pure was as 119 ± 5nm at an incident of 150keV. For most common alloys moderate amounts alloying elements, no significant changes values are measured within 5% accuracy method. The-mean-free path required accurate determination thickness thin foils microscopy using spectroscopy. On basis our experimental results, estimate a single measurement foil to better than 8% if is known 5%. outlined procedure measurements very robust, results being insensitive details such inclination specimen or diffracting conditions.