Electrical connections to dielectric materials

作者: Bruce E Gnade , Scott R Summerfelt , Texas Instruments Incorporated , Eric Thomas

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摘要: A preferred embodiment of this invention comprises an oxidizable layer (e.g. tantalum 48 ), oxygen gettering platinum/tantalum mixture 34 ) overlaying the layer, a noble metal platinum 36 and high-dielectric-constant material barium strontium titanate 38 layer. The novel structures presented provide electrical connection to materials without disadvantages current structures. controls diffusion, minimizing formation resistive either in lower electrode or at electrode/substrate interface. acts as site for oxygen, where oxidizes reactive portion leaving intact. While oxides/suboxides pentoxide 40 that are formed resistive, they dispersed within matrix, conductive path from top bottom. This provides stable electrically while using standard integrated circuit facilitate economize manufacturing process.

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