Fabrication of planar, layered nanoparticles using tri-layer resist templates
作者： Wei Hu , Mingliang Zhang , Robert J Wilson , Ai Leen Koh , Jung-Sub Wi
DOI: 10.1088/0957-4484/22/18/185302
关键词:
摘要: A simple and universal pathway to produce free multilayer synthetic nanoparticles is developed based on lithography, vapor phase deposition and a tri-layer resist lift-off and release …
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sci-hub.se 参考文章(14)
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