Tribological properties of carbon- and nitrogen-implanted Si(100)

摘要: The knowledge of tribological properties silicon is important due to its potential application for micromechanical devices. present work focuses on the friction and wear studies single crystal (100) implanted with carbon nitrogen at 60 keV. These tests were performed using a pin-on-disc (POD) apparatus 52100 pin, under contact stress 225 MPa 35% relative humidity. Changes in surface roughness before after studied atomic force microscopy (AFM). Transmission electron (TEM) investigations ion-channeling measurements revealed amorphous phases all species doses. Although hardness by nano-indentation indicated no improvement samples carbon, an frictional properties. We relate this improved behavior formation SiC.