Effect of oxygen flow rate on the ultraviolet sensing properties of zinc oxide nanocolumn arrays grown by radio frequency magnetron sputtering

摘要: Abstract Highly transparent metal–semiconductor–metal ultraviolet (UV) photoconductive sensors were fabricated using thin (less than 100 nm in thickness), dense, small-diameter ZnO nanocolumn arrays prepared via low-power, catalyst-free radio frequency (RF) magnetron sputtering at different oxygen flow rates ranging from 0 to 25 sccm. The FESEM images revealed the average diameter decreased with increasing rate. transmittance spectra show that introduction of oxygen, visible region improves relative a film absence values greater 95%. UV responsivity and sensitivity significantly improved for sputtered up 10 sccm, highest 9.70 mA/W 2.20×10 4 . Furthermore, which can be attributed increased electrical resistance arrays. Our findings indicate high-performance sensor realised very such would exhibit high sensitivity.