Field Evaporation of Carbonaceous Materials in Laser-Assisted Atom Probe (Effects of the Laser Wavelength and Power)

作者: Y. Kajiwara , Y. Hanaoka , N. Mayama , T. Iwata , M. Taniguchi

DOI: 10.1380/EJSSNT.2010.217

关键词:

摘要: We have observed the laser wavelength (1064, 532, 355 nm) and power (2, 10, 20 nJ per pulse) dependence of field evaporation carbonaceous material on a tungsten needle by three dimensional atom probe (3DAP). Carbonaceous materials were deposited gallium focused ion beam-chemical vapor deposition. Several peaks corresponding to low mass carbon compounds highest at nm. On other hand, predominant with pulse. These results indicate that incident photon energy tip temperature rising should be taken into consideration when using femtosecond pulsed-laser probe. [DOI: 10.1380/ejssnt.2010.217]

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