Dependence of Field Evaporation Voltage on Polarization Angle of Femtosecond Laser in 3D Atom Probe

作者: N. Mayama , S. Mikami , S. Ito , T. Kaneko , T. Iwata

DOI: 10.1380/EJSSNT.2009.70

关键词:

摘要: Recently, laser pulses on a three-dimensional atom probe have been used to induce field evaporation. The advantages of laser-pulse probes are application higher resistivity materials such as semiconductors and high mass resolution. Early studies were performed with nanosecond duration. All evidence from these early most recent using sub-picosecond indicated that the evaporation atoms by occurred thermal pulsing mechanism. On other hand, some experiments resulted in proposal athermal mechanisms (e.g., optical rectification) Thus, mechanism at apex needle specimen has not yet established. We report dependence voltage polarization angle femtosecond for metal specimens. [DOI: 10.1380/ejssnt.2009.70]

参考文章(8)
A. J. Melmed, J. J. Carroll, An approach to realism in field ion microscopy via zone electropolishing Journal of Vacuum Science and Technology. ,vol. 2, pp. 1388- 1389 ,(1984) , 10.1116/1.572370
S. Ito, T. Kaneko, C. Yamashita, T. Kaito, T. Adachi, T. Iwata, N. Mayama, M. Nojima, M. Taniguchi, M. Owari, Development of preset‐type sample stage in three‐dimensional atom probe Surface and Interface Analysis. ,vol. 40, pp. 1696- 1700 ,(2008) , 10.1002/SIA.2942
T.T. Tsong, Field ion image formation Surface Science. ,vol. 70, pp. 211- 233 ,(1978) , 10.1016/0039-6028(78)90410-7
G. L. Kellogg, Determining the field emitter temperature during laser irradiation in the pulsed laser atom probe Journal of Applied Physics. ,vol. 52, pp. 5320- 5328 ,(1981) , 10.1063/1.329390
G. L. Kellogg, T. T. Tsong, Pulsed-laser atom-probe field-ion microscopy Journal of Applied Physics. ,vol. 51, pp. 1184- 1193 ,(1980) , 10.1063/1.327686
N. Mayama, C. Yamashita, T. Kaito, M. Nojima, M. Owari, Stress of needle specimen on the three‐dimensional atom probe (3DAP) Surface and Interface Analysis. ,vol. 40, pp. 1610- 1613 ,(2008) , 10.1002/SIA.2905
T. Kaneko, S. Ito, C. Yamashita, N. Mayama, T. Iwata, M. Nojima, M. Taniguchi, M. Owari, Evaluation of the instrument for three‐dimensional atom probe (3DAP) Surface and Interface Analysis. ,vol. 40, pp. 1688- 1691 ,(2008) , 10.1002/SIA.2962