Development of preset‐type sample stage in three‐dimensional atom probe

作者: S. Ito , T. Kaneko , C. Yamashita , T. Kaito , T. Adachi

DOI: 10.1002/SIA.2942

关键词:

摘要: Three-dimensional atom probe (3DAP) equipped with a newly designed preset-type sample stage has been developed. This new type of can reduce the costs constructing 3DAP instrument, and this instrument consists quite simple components because complicated mechanism to make any desired adjustment is no longer required be done in vacuum. These advantages are expected lead wider distribution 3DAP. In addition, range applications also our equipment atoms field-evaporated by means either high-voltage pulses or femto-second laser pulses. In article, performance pulse voltage mode described illustrated through investigation metals. Copyright © 2008 John Wiley & Sons, Ltd.

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