Coatings for microelectronic devices and substrates
作者： Loren Andrew Haluska
DOI:
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摘要: The present invention relates to a method of forming ceramic or ceramic-like coating on substrate, especially electronic devices, as well the substrate coated thereby. comprises said with solution comprising solvent, hydrogen silsesquioxane resin and modifying oxide precursor selected from group consisting tantalum precursors, niobium vanadium phosphorous precursors boron precursors. solvent is then evaporated thereby deposit preceramic substrate. ceramified by heating temperature between about 40° C. 1000° This coating, moreover, may be covered additional passivation barrier coatings.
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