Hydrogen plasma diagnosis in penning ion source by optical emission spectroscopy
作者： Da-Zhi Jin , Zhong-Hai Yang , Ping-Ying Tang , Kun-xiang Xiao , Jing-yi Dai
DOI: 10.1016/J.VACUUM.2008.05.009
关键词:
摘要: Abstract Penning-type discharge plasma ion source is a kind of powerful device applied widely in many fields. In this paper, optical emission spectroscopy (OES) measurement carried out to diagnose the parameters hydrogen miniature penning-type source. The relative intensity neutral atomic spectral lines used evaluate electron temperature plasma. experiment results indicate that Balmer-α, Balmer-β and Balmer-γ exhibits significant dependence on filling gas pressure about 1.5–3 eV range current 30–180 μA when anode voltage fixed at 1.4 kV.
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