作者: A. Qayyum , R. Ahmad , S.A. Ghauri , A. Waheed , M. Zakaullah
DOI: 10.1016/J.VACUUM.2005.09.007
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摘要: Abstract Emission spectroscopy measurements of Balmer-β and Balmer-γ line profiles are carried out to study their shapes intensities as a function discharge parameters such fill pressure (3–7 mbar) input power (200–400 W). A technique based on determining the relative neutral atomic hydrogen emission lines is used evaluate electron temperature, whereas density extracted from Stark broadening (FWHM) H β profile. It found that both intensity exhibit significant dependence in same manner. However, weak contrast γ line. Based optical reported here, plasma can be selected optimize temperature density.