Polymerization of Organosilicones in Microwave Discharges

摘要: Abstract Plasma polymerization of hexamethyldisiloxane (HMDSO) and hexamethyldisilazane (HMDSZ) monomers has been carried out in audio- (2 kHz, 20 kHz), radio- (5 MHz), but principally microwave (2.45 GHz) frequency discharges. Film growth kinetics on glass aluminum substrates have studied by thickness gravimetric measurements; the combined data led to precise determinations film densities. The density data, turn, provide strong evidence for a hitherto unreported structural feature, namely, that films are composed dense solid phase, thin (∼ 500 A) “oligomeric” surface layer. component is about 70% denser than equivalent “conventional” polymer, marked inorganic character, as revealed clearly infrared spectroscopy. IR analyses polymers produced lower discharges tend show narrow, well resolved absorption bands. In case 2.45 GHz films, other hand, bands corresponding “inorganic” linkages become bro...