The theory and practice of high resolution scanning electron microscopy

作者: David C. Joy

DOI: 10.1016/0304-3991(91)90020-7

关键词:

摘要: … .optics and in our understanding of dectron-solid interactions which have facilitated these … the target, but since the backscattered electrons sample a volume of the sample comparable in …

参考文章(10)
S. Pennycook, D. Jesson, High-resolution incoherent imaging of crystals Physical Review Letters. ,vol. 64, pp. 938- 941 ,(1990) , 10.1103/PHYSREVLETT.64.938
S.J. Pennycook, Delocalization corrections for electron channeling analysis Ultramicroscopy. ,vol. 26, pp. 239- 248 ,(1988) , 10.1016/0304-3991(88)90397-X
David C. Joy, Beam interactions, contrast and resolution in the SEM Journal of Microscopy. ,vol. 136, pp. 241- 258 ,(1984) , 10.1111/J.1365-2818.1984.TB00532.X
H Seiler, Secondary electron emission in the scanning electron microscope Journal of Applied Physics. ,vol. 54, ,(1983) , 10.1063/1.332840
Oliver C. Wells, Low‐Loss Image for Surface Scanning Electron Microscope Applied Physics Letters. ,vol. 19, pp. 232- 235 ,(1971) , 10.1063/1.1653899
David C. Joy, Dale E. Newbury, David L. Davidson, Electron channeling patterns in the scanning electron microscope Journal of Applied Physics. ,vol. 53, ,(1982) , 10.1063/1.331668
Robert P. Apkarian, Marc D. Gutekunst, David C. Joy, High resolution SE-I SEM study of enamel crystal morphology. Journal of Electron Microscopy Technique. ,vol. 14, pp. 70- 78 ,(1990) , 10.1002/JEMT.1060140111
A. J. Craven, J. M. Gibson, A. Howie, D. R. Spalding, Study of single-electron excitations by electron microscopy I. Image contrast from delocalized excitations Philosophical Magazine. ,vol. 38, pp. 519- 527 ,(1978) , 10.1080/01418617808239251