Far infrared through millimeter Backshort-Under-Grid arrays
作者： Christine A. Allen , John Abrahams , Dominic J. Benford , James A. Chervenak , David T. Chuss
DOI: 10.1117/12.672125
关键词:
摘要: We are developing a large-format, versatile, bolometer array for wide range of infrared through millimeter astronomical applications. The design consists three key components - superconducting transition edge sensor arrays, quarter-wave reflective backshort grids, and Superconducting Quantum Interference Device (SQUID) multiplexer readouts. detector is filled, square grid bolometers with sensors. arrays fabricated separately positioned in the etch cavities behind grid. grids have unique three-dimensional interlocking features micromachined into walls positioning mechanical stability. ultimate goal program to produce large-format background-limited sensitivity, suitable wavelengths Large-format (kilopixel) will be directly indium bump bonded SQUID circuit. produced tested 8×8 1 mm detectors demonstrate proof concept. 8×16 2 being new Goddard Space Flight Center instrument. also models kilopixel dummy chip bonding development. present overview, several fabrication highlights, assembly technologies.
harvard.edu
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