Glass-modified stress waves for adhesion measurement of ultra thin films for device applications
作者： Vijay Gupta , Vassili Kireev , Jun Tian , Hiroshi Yoshida , Haruo Akahoshi
DOI: 10.1016/S0022-5096(03)00057-7
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摘要: … In the laser spallation experiment, a laser-generated compressive stress pulse in the substrate reflects into a tensile wave from the film's free surface and pries off its interface at a …
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