Transparent conductive layer forming method, transparent conductive layer formed by the method, and material comprising the layer
作者： Takakazu Kiyomura , Toshio Tsuji , Hiroto Itoh
DOI:
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摘要: A transparent conductive layer forming method is disclosed which comprises the steps of introducing a reactive gas to discharge space, exciting in plasma state by at atmospheric pressure or approximately pressure, and exposing substrate form on substrate, wherein reducing gas.
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