Zinc oxide-based conductive multilayer structure, process for producing same, and electronic device
作者： Satoshi Naganawa , Takahiro Yamada , Takeshi Kondo , Tetsuya Yamamoto , Koichi Nagamoto
DOI:
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摘要: Disclosed is a zinc oxide-based conductive multilayer structure (1) which comprises base (11) and, formed on at least one surface thereof, an undercoat layer (12) and transparent film (13). The composed of plurality layers comprising material, has carrier density 2.0×1020-9.8×1020 cm-3. sheet resistivity change 50 or less through bending in the bent along round bar having diameter 15 mm, with facing inward.
lens.org 参考文章(16)
Seiichiro Yokoyama, Syunji Kurahara, Yasushi Aikawa, Hiroyuki Nagahama, Katsuya Ito, Toshiyuki Oya, Yoshiharu Morihara, Transparent conductive film, transparent conductive sheet and touchpanel ,(2001)
Takakazu Kiyomura, Toshio Tsuji, Hiroto Itoh, Transparent conductive layer forming method, transparent conductive layer formed by the method, and material comprising the layer ,(2002)
Taichi Kobayashi, Shingo Oono, Mitsuhiro Nishida, Masato Yoshikawa, Yoshinori Iwabuchi, Yukihiro Kusano, Hidefumi Kotsubo, Transparent electroconductive film, method for manufacture thereof, and touch panel ,(2002)
Osamu Nakagawara, Yutaka Kishimoto, Hiroyuki Seto, Yoshihiro Koshido, Yukio Yoshino, Takahiro Makino, Moisture-resistant ZnO transparent conductive films with Ga heavy doping Applied Physics Letters. ,vol. 89, pp. 091904- ,(2006) , 10.1063/1.2337542
K. Iwata, T. Sakemi, A. Yamada, P. Fons, K. Awai, T. Yamamoto, M. Matsubara, H. Tampo, S. Niki, Growth and electrical properties of ZnO thin films deposited by novel ion plating method Thin Solid Films. ,vol. 445, pp. 274- 277 ,(2003) , 10.1016/S0040-6090(03)01160-X
Hitoshi Hokari, Hiroaki Iwaoka, Motohiko Yoshida, Akira Ujihara, Hisao Makino, Yoshinori Hirashima, Hisashi Aoki, Naoki Yamamoto, Tetsuya Yamamoto, Display Substrate Having a Transparent Conductive Layer Made of Zinc Oxide and Manufacturing Method Thereof ,(2009)
Souko Fukahori, Yutaka Kishimoto, Transparent conductive film and method for producing transparent conductive film ,(2008)
Bungo Hatta, Tetsuya Yamamoto, Juichi Fukatani, Gallium containing zinc oxide ,(2006)
Souko Fukahori, Yutaka Kishimoto, Conductive film and method for production of conductive film ,(2008)
Masayuki Kamei, Yoshinori Iwabuchi, Osamu Shiino, 雅人 吉川, Masahito Yoshikawa, 芳典 岩淵, 雅之 亀井, 修 椎野, Film-forming method of crystalline zno system transparent conductive thin film, crystalline zno system transparent conductive thin film and film, as well as resistance film type touch panel ,(2006)