Voltage tunable Ba0.6Sr0.4TiO3 thin films and coplanar phase shifters
作者： Chunlin Fu , Wei Cai , Hongwei Chen , Shucheng Feng , Fusheng Pan
DOI: 10.1016/J.TSF.2007.07.059
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摘要: Abstract Not only the ferroelectric properties of Ba0.6Sr0.4TiO3 thin films but also design, fabrication and microwave coplanar waveguide (CPW) phase shifter were investigated. When applied voltage changes from zero to 20 V range at a frequency 1 kHz, dielectric constant, tunability, remanent polarization (2Pr) coercive electric field (Ec) BST are 1266, 29.5%, 2.29 μC/cm2 22.27 kV/cm, respectively. The structure CPW was designed by ANSOFT High Frequency Structure Simulator (HFSS) Agilent Advanced Design System (ADS). consists 56 same sections. It is observed photograph fabricated device that lines electrodes regular widths bottom overlapped top about 5 μm. found shift gradually increases as 0 V 20 V, which may be due tunability varies with external dc field. About 168° achieved 28 GHz bias 20 V.
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P. M. Suherman, T. J. Jackson, Y. Y. Tse, I. P. Jones, R. I. Chakalova, M. J. Lancaster, A. Porch, Microwave properties of Ba0.5Sr0.5TiO3 thin film coplanar phase shifters Journal of Applied Physics. ,vol. 99, pp. 104101- ,(2006) , 10.1063/1.2198933
S. K. Dey, C. G. Wang, W. Cao, S. Bhaskar, J. Li, G. Subramanyam, Voltage tunable epitaxial PbxSr(1-x)TiO3 films on sapphire by MOCVD: Nanostructure and microwave properties Journal of Materials Science. ,vol. 41, pp. 77- 86 ,(2006) , 10.1007/978-0-387-38039-1_7
Jun-Kyu Yang, Woo Sik Kim, Hyung-Ho Park, Effect of grain size of Pb(Zr0.4Ti0.6)O3 sol–gel derived thin films on the ferroelectric properties Applied Surface Science. ,vol. 169-170, pp. 544- 548 ,(2001) , 10.1016/S0169-4332(00)00718-2
W. Kim, M.F. Iskander, C. Tanaka, High-performance low-cost phase-shifter design based on ferroelectric materials technology Electronics Letters. ,vol. 40, pp. 1345- 1347 ,(2004) , 10.1049/EL:20046119
O. Yu. Buslov, V. N. Keis, A. B. Kozyrev, I. V. Kotel’nikov, P. V. Kulik, Integrated ferroelectric millimeter-wave phase shifters with a periodic structure Technical Physics. ,vol. 50, pp. 1195- 1200 ,(2005) , 10.1134/1.2051462
Hargsoon Yoon, Design and performance of bilateral interdigital coplanar waveguide phase shifter for rf communication applications Journal of Micro/Nanolithography, MEMS, and MOEMS. ,vol. 3, pp. 459- 466 ,(2004) , 10.1117/1.1759331
Hongwei Chen, Chuanren Yang, Chunlin Fu, Li Zhao, Zhiqiang Gao, The size effect of Ba0.6Sr0.4TiO3 thin films on the ferroelectric properties Applied Surface Science. ,vol. 252, pp. 4171- 4177 ,(2006) , 10.1016/J.APSUSC.2005.06.027
Kyoung Bo Han, Chang Hoon Jeon, Hee Sauk Jhon, Sang Yeol Lee, Effect of grain size on the electrical properties of (Pb0.72La0.28)Ti0.93O3 thin films grown by pulsed laser deposition Materials Science in Semiconductor Processing. ,vol. 5, pp. 249- 252 ,(2002) , 10.1016/S1369-8001(02)00112-9
Chunlin Fu, Chuanren Yang, Hongwei Chen, Liye Hu, Model for dielectric nonlinearity of ferroelectrics Journal of Applied Physics. ,vol. 97, pp. 034110- ,(2005) , 10.1063/1.1846134
Chunlin Fu, Chuanren Yang, Hongwei Chen, Liye Hu, Yingxin Wang, Ferroelectric properties of Ba0.6Sr0.4TiO3 thin films with different grain sizes Materials Letters. ,vol. 59, pp. 330- 333 ,(2005) , 10.1016/J.MATLET.2004.10.023