Effect of grain size on the electrical properties of (Pb0.72La0.28)Ti0.93O3 thin films grown by pulsed laser deposition
作者： Kyoung Bo Han , Chang Hoon Jeon , Hee Sauk Jhon , Sang Yeol Lee
DOI: 10.1016/S1369-8001(02)00112-9
关键词:
摘要: Abstract Thin films of phase-pure perovskite PLT [(Pb 0.72 La 0.28 )Ti 0.93 O 3 ] were deposited in-situ onto Pt(1 1 1)/Ti/SiO 2 /Si(1 0 0) substrates by pulsed laser deposition from a stoichiometric target. We have systematically investigated the variation grain sizes depending on process conditions. The thin changed 110 to 350 nm changing annealing parameters and using two-step process. confirmed that varied under these C – V measurements, polarization loops, leakage current measurements scanning electron microscopy performed investigate electrical microstructural properties (Pb,La)TiO films.
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