Beam-assisted-etching technique for fabrication of single crystal diamond field emitter tip
作者： J. Taniguchi , J. Yokoyama , M. Komuro , H. Hiroshima , I. Miyamoto
DOI: 10.1016/S0167-9317(00)00346-4
关键词:
摘要: We fabricated a single crystal diamond field emitter tip using focused ion beam assisted etching and investigated characteristics of electron emission from diamond. Electron is emission. FIB very useful to reduce site.
elsevier.com
sci-hub.se 参考文章(8)
M. Fanciulli, T. D. Moustakas, Defects in diamond thin films. Physical Review B. ,vol. 48, pp. 14982- 14988 ,(1993) , 10.1103/PHYSREVB.48.14982
Jun Taniguchi, Iwao Miyamoto, Naoto Ohno, Satoshi Honda, Electron beam assisted chemical etching of single crystal diamond substrates Japanese Journal of Applied Physics. ,vol. 35, pp. 6574- 6578 ,(1996) , 10.1143/JJAP.35.6574
N.S. Xu, R.V. Latham, Y. Tzeng, Field-dependence of the area-density of 'cold' electron emission sites on broad-area CVD diamond films Electronics Letters. ,vol. 29, pp. 1596- 1597 ,(1993) , 10.1049/EL:19931063
Jun Taniguchi, Masanori Komuro, Hiroshi Hiroshima, Iwao Miyamoto, Field emission from electron-beam-irradiated bulk diamond international vacuum electron sources conference. ,vol. 146, pp. 299- 304 ,(1999) , 10.1016/S0169-4332(99)00035-5
Ken Okano, Kimihiko Hoshina, Masamori Iida, Satoshi Koizumi, Tadao Inuzuka, Fabrication of a diamond field emitter array Applied Physics Letters. ,vol. 64, pp. 2742- 2744 ,(1994) , 10.1063/1.111460
Jun Taniguchi, Focused-ion-beam-assisted etching of diamond in XeF[sub 2] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 16, pp. 2506- 2510 ,(1998) , 10.1116/1.590199
Jun Taniguchi, Iwao Miyamoto, Naoto Ohno, Ken'ichi Kantani, Masanori Komuro, Hiroshi Hiroshima, Electron Beam Assisted Chemical Etching of Single-Crystal Diamond Substrates with Hydrogen Gas Japanese Journal of Applied Physics. ,vol. 36, pp. 7691- 7695 ,(1997) , 10.1143/JJAP.36.7691
Ken Okano, Satoshi Koizumi, S. Ravi P. Silva, Gehan A. J. Amaratunga, Low-threshold cold cathodes made of nitrogen-doped chemical-vapour-deposited diamond Nature. ,vol. 381, pp. 140- 141 ,(1996) , 10.1038/381140A0