A Derivation of Ion Energy Distribution Function for Dual Frequencies Capacitively Coupled Plasma
作者： Zhu Wen Zhou , De Liang Chen , Bo Kong , Yuan Sheng Wang
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMM.513-517.4253
关键词:
摘要: A model of ion energy distribution dual frequencies capacitively coupled plasma (CCP) has been investigated, it is important to analyze these phenomenon and mechanism in order control the microelectronic processes integrated circuit develop base theories physics. We focused on function distributions under high low (dual frequencies) drive capacitive discharges, we derived a theory driven IEDs from analyzing theories. The can predict different driven, which results accurate multi-peaks width for given parameters, particle-in-cell (PIC) simulations are used verify this model.
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