An analytical model of computing ion energy distributions for multiple frequencies capacitive discharges
作者： Zhuwen Zhou , Rongfeng Linghu , Mingsen Deng , Deyong Xiong
DOI: 10.1063/1.4754447
关键词: Plasma parameters 、 Transfer function 、 Atmospheric-pressure plasma 、 Energy (signal processing) 、 Low-pressure discharge 、 Computational physics 、 Capacitive sensing 、 Analytical chemistry 、 Voltage 、 Chemistry 、 Radio frequency
摘要: We have developed an analytical multi-frequency model, which results in accurate multi-peaks of the ion energy distributions (IEDs) for given control parameters. The model can analytically calculate and predict IEDs multiple peaks width with necessary plasma This also from frequencies' drives at any voltage, associated are compared particle-in-cell (PIC) simulations. IED a surface is important parameter processing radio frequencies driven capacitive discharges. low pressure discharge based on linear transfer function that relates time-varying sheath voltage to response surface. good agreement PIC simulations over wide range excitations.
scitation.org
harvard.edu
aip.org 
sci-hub.se 参考文章(16)
M. Olevanov, O. Proshina, T. Rakhimova, D. Voloshin, Ion energy distribution function in dual-frequency rf capacitively coupled discharges: analytical model. Physical Review E. ,vol. 78, pp. 026404- ,(2008) , 10.1103/PHYSREVE.78.026404
W. C. Chen, X. M. Zhu, S. Zhang, Y. K. Pu, Reconstruction of ion energy distribution function in a capacitive rf discharge Applied Physics Letters. ,vol. 94, pp. 211503- ,(2009) , 10.1063/1.3147216
E Kawamura, V Vahedi, M A Lieberman, C K Birdsall, Ion energy distributions in rf sheaths; review, analysis and simulation Plasma Sources Science and Technology. ,vol. 8, ,(1999) , 10.1088/0963-0252/8/3/202
V. Georgieva, A. Bogaerts, R. Gijbels, Numerical investigation of ion energy distribution functions in single and dual frequency capacitively coupled plasma reactors Physical Review E. ,vol. 69, pp. 026406- ,(2004) , 10.1103/PHYSREVE.69.026406
Ying Wang, Michael A. Lieberman, Alan C. F. Wu, John P. Verboncoeur, Verification of collisionless sheath model of capacitive rf discharges by particle-in-cell simulations Journal of Applied Physics. ,vol. 110, pp. 033307- ,(2011) , 10.1063/1.3620983
Wang Li-Hong, Dai Zhong-Ling, Wang You-Nian, Investigation of Dual Radio-Frequency Driven Sheaths and Ion Energy Distributions Bombarding an Insulating Substrate Chinese Physics Letters. ,vol. 23, pp. 668- 671 ,(2006) , 10.1088/0256-307X/23/3/040
H. C. Kim, J. K. Lee, Dual radio-frequency discharges: Effective frequency concept and effective frequency transition Journal of Vacuum Science and Technology. ,vol. 23, pp. 651- 657 ,(2005) , 10.1116/1.1931683
Zhen-Qun Guan, Zhong-Ling Dai, You-Nian Wang, Simulations of dual rf-biased sheaths and ion energy distributions arriving at a dual rf-biased electrode Physics of Plasmas. ,vol. 12, pp. 123502- ,(2005) , 10.1063/1.2142247
Pierre Benoit‐Cattin, Louis‐Christian Bernard, Anomalies of the Energy of Positive Ions Extracted from High‐Frequency Ion Sources. A Theoretical Study Journal of Applied Physics. ,vol. 39, pp. 5723- 5726 ,(1968) , 10.1063/1.1656039
D. Israel, K.-U. Riemann, L. Tsendin, Charge exchange collisions and ion velocity distribution at the electrode of low pressure capacitive rf discharges Journal of Applied Physics. ,vol. 99, pp. 093303- ,(2006) , 10.1063/1.2191622