Model and particle-in-cell simulation of ion energy distribution in collisionless sheath
作者： Zhuwen Zhou , Bo Kong , Deliang Chen , Yuee Luo , Yuansheng Wang
DOI: 10.1063/1.4922313
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摘要: In this paper, we propose a self-consistent theoretical model, which is described by the ion energy distributions (IEDs) in collisionless sheaths, and analytical results for different combined dc/radio frequency (rf) capacitive coupled plasma discharge cases, including sheath voltage errors analysis, are compared with of numerical simulations using one-dimensional plane-parallel particle-in-cell (PIC) simulation. The IEDs sheaths performed on combination dc/rf sources electrodes argon as process gas. incident ions grounded electrode separated, according to their radio frequencies, dc voltages separated electrode, IEDs, widths thickness discussed. IED widths, model investigated show good agreement PIC simulations.
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