Capacitive discharges driven by combined dc/rf sources
作者： E. Kawamura , M. A. Lieberman , A. J. Lichtenberg , E. A. Hudson
DOI: 10.1116/1.2771561
关键词:
摘要: We have obtained analytic expressions for the sheath voltages and widths both collisional collisionless sheaths driven by a combination of dc rf voltage sources. A “dc/rf sheath” develops on negatively biased electrode while typical other electrode. The dc/rf has region with negligible electron density near Furthermore, if power is held constant (typical industrial plasmas sources), drop nearly independent provided discharge configuration does not lead to significant increase in ionization efficiency secondary electrons. analysis done symmetric (equal area) asymmetric diode discharges, as well triode configuration. analytical results discharges are compared numerical simulations using plane-parallel cylindrical particle-in-cell (PIC) codes over wide range pressures frequencies, finding good agreement. effect electrons also examined PIC codes, increased efficiency.
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