Spectroscopic ellipsometric measurements of the dielectric function of germanium dioxide films on crystal germanium

摘要: From spectroscopic ellipsometry measurements in the 1.5–5.7 eV photon energy range we determined complex dielectric function of thermally grown germanium dioxide 1.0–6.3 range. A Kramers–Kronig consistent dispersion formula utilizing an exponential‐shaped optical band edge was used conjunction with both previously published far ultraviolet absorbance data for amorphous GeO2 and our spectra. These show that e2 can be regarded to zero E<5.5 eV, which differs from a previous report. Using these new results investigation oxide growth, find grows via parabolic growth law constant, kp=1.2×10−19 m2 s−1 at 550 °C.