Coating composition for the production of insulating thin films
作者： Mikihiko Nakamura , Toru Araki , Hiroyuki Hanahata
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摘要: A coating composition for the production of insulating thin films which comprises (A) a silica precursor containing at least one member selected from group consisting alkoxysilanes and hydrolyzates thereof, (B) organic polymer, (C) water, (D) alcohol, and, if necessary, (E) an solvent mixture components (A), (B), (D), characterized in that water/precursor (C/A) weight ratio (WR) satisfies relationship: 0.01 < WR 10, water is greater than alcohol when polymer insoluble with all to (E).
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