Thermally isolated silicon layer
作者： Arnold Peter Roscoe Harpin , Andrew George Rickman , Jolyon Richard Tidmarsh
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摘要: An integrated optical circuit is formed in a silicon layer and supported on substrate (5), portion (1) of the substantially thermally isolated from (5) by extending over recess (2) e.g. form bridge. Temperature control means (9) are provided to temperature said or device thereon. A thermal expansion gap (1A) may be accommodate relative (5).
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