Identifying layout regions susceptible to fabrication issues by using range patterns

作者: Subarnarekha Sinha , Charles C. Chiang , Hailong Yao

DOI:

关键词:

摘要: A range pattern is matched to a block of an IC layout by slicing the and pattern, followed comparing sequence widths slices width ranges if any slice falls outside corresponding then does not match pattern. If comparison succeeds, further comparisons are made between lengths fragments in each length slices. fragment all within their respective ranges, matches although additional constraints checked some embodiments.

参考文章(44)
Frantisek Franek, Christopher G. Jennings, William F. Smyth, A Simple Fast Hybrid Pattern-Matching Algorithm Combinatorial Pattern Matching. pp. 288- 297 ,(2005) , 10.1007/11496656_25
Koji Hashimoto, Takeshi Ito, Takahiro Ikeda, Apparatus and method for verifying an integrated circuit pattern ,(2004)
Thierry Lecroq, Christian Charras, Handbook of Exact String Matching Algorithms ,(2004)
Charles H. Wallace, Swaminathan (Sam) Sivakumar, Paul A. Nyhus, Sub-resolution assist features ,(2004)
Jason Hibbeler, Robert F. Walker, Michael S. Gray, Mervyn Y. Tan, Daniel N. Maynard, Albert M. Chu, Faye D. Baker, Robert J. Allen, IC layout optimization to improve yield ,(2006)
Gerard Lukpat, Alexander Miloslavsky, Fast lithography compliance check for place and route optimization ,(2010)
Eugene Shifrin, Gordon Rouse, Brian Duffy, Kais Maayah, Ashok Kulkarni, Methods and systems for determining a position of inspection data in design data space ,(2007)