Fast lithography compliance check for place and route optimization

摘要: A computer is programmed to use at least one rule identify from within a layout of an IC design, set regions likely fail if fabricated unchanged. An example such detection check for presence two neighbors neither which fully overlaps short wire or end long wire. The uses another change region in the regions, obtain second less identified regions. correction elongate neighbors. may perform optical checking (ORC) any order relative application rules, e.g. ORC can be performed between rules and i.e. individually on each prior correction.