Method and System for Lithography Hotspot Correction of a Post-Route Layout
作者： Yang-Shan Tong
DOI:
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摘要: Disclosed herein are correcting methods and devices for lithography hotspots of the post-routing layout, used detected in layout. At least one two-dimensional pattern changeable size or position each said number local area where it is located selected adjusted, so that simulation value aerial image intensity various areas optimized, as to improve problem caused by hotspots. The derived through calculation with respect a set optical model cells, cell can be determined numerical distribution basic patterns. After adjustment change amount pattern, hotspot calculated cells have been provided, synthesize after change.
lens.org 参考文章(27)
Ankush Oberai, Failure analysis using design rules ,(2011)
Hua Song, Lantiang Wang, ZongWu Tang, Locating critical dimension(s) of a layout feature in an IC design by modeling simulated intensities ,(2006)
Peter Wohl, Frederic J. Neuveux, John A. Waicukauski, Fully x-tolerant, very high scan compression scan test systems and techniques ,(2009)
Stefan Hunsche, Jiangwei Li, Jun Ye, Method for process window optimized optical proximity correction ,(2013)
Gerard Lukpat, Alexander Miloslavsky, Fast lithography compliance check for place and route optimization ,(2010)
Christophe Pierrat, Phase shift masking for complex patterns with proximity adjustments ,(2002)
Yi-Min Jiang, Ping-Hann Peter Wang, Chuan-Yu Wang, Method and system for genetic algorithm based power optimization for integrated circuit designs ,(2000)
Valerio Perez, Shyue Fong Quek, Sky Yeo, Colin Hui, Kuang Kuo Lin, Walter Ng, Michel Cote, Bala Kasthuri, Philippe Hurat, Matt A. Thompson, Chi-Min Yuan, Puneet Sharma, Convergent Automated Chip Level Lithography Checking and Fixing at 45nm Proceedings of SPIE. ,vol. 7275, ,(2009) , 10.1117/12.816593
Kyoko Izuha, Fumihiro Minami, Ryuji Ogawa, Satoshi Tanaka, Toshiaki Ueda, Semiconductor circuit pattern design method for manufacturing semiconductor device or liquid crystal display device ,(2006)
Srinivas Doddi, Ya-Chieh Lai, Kuanghao Lay, Weiping Fang, Frank E. Gennari, Matthew Moskewicz, Junjiang Lei, Method and system for model-based design and layout of an integrated circuit ,(2012)