Improvement of Photoluminescence Uniformity of Porous Silicon by using Stirring Anodization Process
作者： Hsi-Ting Hou , Jia-Chuan Lin , Sin-Hong Liu , Meng-Kai Hsu
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摘要: The electrolyte stirring method of anodization etch ing process for manufacturing porous silicon (PS) is re ported in this work. Two experimental setups nature air (PS- ASM) and (PS-ESM) are employed to clari fy the influence mechanisms on electrochemical etching proc ess. Compared traditional fabrication without any appara tus (PS-TM), a large plateau region PS surface structure obtained from samples with both methods by 3D-profiler measurement. Moreover, light emission response also improved pr oposed due cycling force electr olyte could effectively enhance etch-carrier distribution while made. According analysis statistical calculation photoluminescence (PL) intensity, lo wer standard deviations PS-samples studied methods, i.e. uniformity PL-intensity improved. calculated 93.2, 74. 5 64, respectively, PS-TM, PS-ASM PS-ESM.
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