Electrically insulating silicon carbide sintered body

摘要: A silicon carbide sintered body comprising as principal constituent, a first component for providing electrical insulating properties to said carbide, at least one of metallic beryllium, beryllium compounds, boron and compounds contained in total amount 0.01 3.5% by weight calculated metal, second which can further promote sinterability provided does not diffuse easily the particles substance selected from Group I elements exclusive hydrogen francium, II radium mercury, III aluminum, IV carbon, V elements, VIa VIIa VIII iron, thereof, 10% weight, with remainder substantially carbide. This has an resistivity 107 Ω.cm or above room temperature is also excellent be advantageously used substrates semiconductor devices, etc.