Growth, structural and mechanical properties of magnetron-sputtered ZrN/SiNx nanolaminated coatings
作者： G Abadias , VV Uglov , IA Saladukhin , SV Zlotski , G Tolmachova
DOI: 10.1016/J.SURFCOAT.2016.06.099
关键词:
摘要: … of structure, stress state and mechanical properties of nanoscale ZrN/SiN x multilayers with … X-ray diffraction (XRD) show that the presence of amorphous SiN x layer (for elementary …
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