Development of a 6×6 Element Air-Coupled Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer Array, M3-CMUT, for High Resolution Detection Applications☆

摘要: A 2 -D multiple moving membrane capacitive micromachined ultras onic transducer (M3 -CMUT) array has been developed for air-coupled detection purposes in the megahertz frequency range. The i ncludes an of 6×6 M3 -CMUT elements. This benefits from a novel configuration where stack two vibrating membranes suspended over fixed grounded electrode are involved signal transmission and detection. Using this configuration, amplitude vibration is increased that enhances power output sensitivity. Electrical acoustic characterization presented paper. © 2014 Authors. Published by Elsevier Ltd. Peer -review under responsibility scientific committee Euros ensors .