Surface-Micromachined CMUT Using Low-Temperature Deposited Silicon Carbide Membranes for Above-IC Integration
作者： Qing Zhang , Paul-Vahe Cicek , Karim Allidina , Frederic Nabki , Mourad N. El-Gamal
DOI: 10.1109/JMEMS.2013.2281304
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摘要: … In this work, the transducers are based on the slit-type design. … in this work using the slit-type design is 240 μm in diameter. … , “A capacitive micromachined ultrasonic transducer array for …
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sci-hub.se 参考文章(33)
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