An Air-Coupled Multiple Moving Membrane Micromachined Ultrasonic Transducer With Inverse Biasing Functionality
作者： Arezoo Emadi , Douglas A. Buchanan
DOI: 10.1109/TUFFC.2016.2574336
关键词:
摘要: A novel air-coupled multiple moving membrane-capacitive micromachined ultrasonic transducer ( $\text{M}^{3}$ -CMUT) with individually biased deflectable plates has been developed. Unlike the conventional capacitive transducer, this device cell structure includes an additional plate that is suspended underneath top plate. This added flexible contributes to signal transmission and reception. It demonstrated due presence of plate, capable operating under inverse bias condition, where driving voltage sandwiched between two grounded electrodes. COMSOL electromechanical simulations were conducted investigate influence set three individuals array $1 \times 23~\text{M}^{3}$ -CMUT transducers fabricated using a sacrificial technique resonant frequencies ranging from 0.8 2.1 MHz. Electrical, optical, pitch-catch acoustic measurements performed characterize properties condition. The experimental results are shown be in good agreement simulation for all transducers. these fully functional both normal conditions without any degradation performance.
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