A Two-Port Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer with Reduced Effective Height and Enhanced Sensitivity
作者： Rima Butrus , Haleh Nazemi , Muhammad Umair Nathani , Rohit Karmarkar , Douglas Buchanan
DOI: 10.1109/IUS46767.2020.9251591
关键词:
摘要: This paper presents a theoretical model and an experimental validation of two-port multiple moving membrane capacitive micromachined ultrasonic transducer. The developed transducer includes stack two flexible membranes suspended on fixed electrode. is fabricated utilizing sacrificial technique, PolyMUMPs, with resonant frequency 1.8 MHz. Electrical measurements are conducted using impedance analyzer in order to investigate the influence transducer's additional device effective cavity height. This, consequently, influences acoustic power generation. deigned port enables dynamic change height through adjusting applied DC bias voltage. results validate this hypothesis shown agreement results.
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